Independence Day for your RF system

Symmetrical open loop response

High accuracy power measurement

cito Plus RF Power Generator

The solution for demanding RF plasma processing

cito Plus offers superior pulsing quality, stability and power measurement accuracy, making it the best choice for plasma deposition and etch applications, as well as for non-semiconductor applications.

  • High up time - focus on throughput and lower operating costs
  • Value in accuracy, repeatability and stability - meet your process requirements
  • Higher power efficiency - better economics and environmental friendly footprint

Benefits

  • Improved plasma stability for process repeatability
  • Ideal pulse waveforms into high VSWR
  • Precise power accuracy for tighter control of plasma processing
  • Cable length insensitivity for ease of system integration
  • Increased efficiency for lower operating costs

Consider cito Plus for upgrades and replacements

  • Better stability over what is on the tools now
  • Can be used for Bias and source

The Plug & Play system offers you:
  • Available interfaces: RS-232C, Ethernet, Profibus, etc.)
  • Coaxial cable insensitivity – no need to adjust for length – keep the same cables
  • Air-cooled no cooling lines
  • Easy user friendly front panel control or passive panel
  • AC input large range covered 187 VAC ~ 250 VAC

Upgrade now!

Analog Interface descriptions

Product Search

Type Designation Part Number Frequency (MHz) RF Power (W) AC Input Fieldbus Datasheet
cito Plus 6010-ACNA-N25A-FP 65001210 60 1000 230 VAC none PDF
cito Plus 6010-ACNA-N37A-FN 65001111 60 1000 230 VAC none PDF
cito Plus 6010-ACNA-N25C-FP 65001035 60 1000 230 VAC none PDF
cito Plus 606-APNA-N25A-FP 65001215 60 600 230 VAC none PDF
cito Plus 606-APNA-N25A-FN 65001214 60 600 230 VAC none PDF
cito Plus 606-ACNA-N37A-FP 65001010 60 600 230 VAC none PDF
cito Plus 606-ACNA-N37A-FN 65001110 60 600 230 VAC none PDF
cito Plus 6010-APNA-N25C-FP 65001213 60 1000 230 VAC none PDF
cito Plus 6010-APNA-N25C-FN 65001212 60 1000 230 VAC none PDF
cito Plus 6010-APNA-N25A-FN 65001211 60 1000 230 VAC none PDF
cito Plus 6010-ACNA-N37A-FP 65001011 60 1000 230 VAC none PDF
cito Plus 1310-ACNA-N25A-FN 64001142 13.56 1000 230 VAC none PDF
cito Plus 1310-ACNA-N25A-FP 64001042 13.56 1000 230 VAC none PDF
cito Plus 1310-ACNA-N25C-FP 64001028 13.56 1000 230 VAC none PDF
cito Plus 1310-ACNA-P37A-FP 64001027 13.56 1000 230 VAC Profibus PDF
cito Plus 136-ACNA-N37A-FP 64001021 13.56 600 230 VAC none PDF
cito Plus 1310-ACNA-N37A-FP 64001200 13.56 1000 230 VAC none PDF
cito Plus 1310-ACNA-N37C-FN 64001130 13.56 1000 230 VAC none PDF
cito Plus 1310-ACNA-N37A-FP-003 64001057 13.56 1000 230 VAC none PDF
cito Plus 136-ACNA-N37A-FN 64001121 13.56 600 230 VAC none PDF
cito Plus 136-ACNA-N25A-FN 64001135 13.56 600 230 VAC none PDF
cito Plus 1310-APNA-N37A-FP-003 64001212 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-N25A-FP 64001218 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-N25A-FN 64001217 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-N25C-FP-002 64001214 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-N25C-FP 64001213 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-N37A-FP 64001211 13.56 1000 230 VAC none PDF
cito Plus 1310-APNA-P37A-FP 64001210 13.56 1000 230 VAC Profibus PDF
cito Plus 136-ACNA-P37A-FP 64001031 13.56 600 230 VAC Profibus PDF
cito Plus 136-ACNA-N25A-FP 64001035 13.56 600 230 VAC none PDF
cito Plus 136-APNA-N25A-FN 64001215 13.56 600 230 VAC none PDF
cito Plus 136-APNA-N25A-FP 64001219 13.56 600 230 VAC none PDF
cito Plus 136-APNA-N37A-FN 64001215 13.56 600 230 VAC none PDF

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