High Speed Vacuum Capacitor Drive Systems
Increase the reliability and useful lifetime of your impedance matching network with the best vacuum capacitors along with the latest drive system technology.
To enable the technology inflections in the semiconductor industry, more RF applications are necessary. The increasing number of etch/deposition processes results in an increased number of necessary tools. Production processes become faster, single steps are shorter and more frequent, and the demands on equipment grow.
The lifetime of vacuum capacitors – which are the critical parts of impedance matching networks – is mainly determined by time-to-failure of its moving parts, the bellows and drive systems. Comet has continually improved its capacitors over many years to meet and answer the formidable challenging requirements of the semiconductor industry.
The Comet Ultra Life drive system increases capacitor and matching network lifetime significantly by three or more times.